OpenUnited Kingdom
Purchase of maskless laser lithography system
Key facts
- Buyer
- Cardiff University
- Country
- United Kingdom
- Region
- UKL22
- Estimated value
- £415,000
- Published
- Source
- UK Find a Tender
Description
The Institute for Compound Semiconductors (ICS) intends to procure a maskless laser lithography system to support essential expansion of its hybrid electro‑optical lithography capability. The system will enable processing in which wafers are exposed using both electron‑beam lithography and optical radiation within the same resist layer(s), or across multiple aligned resist layers. ICS has previously invested €2.5 M in a state‑of‑the‑art electron beam lithography platform capable of patterning nanoscale features down to 10 nm. To fully realise the benefits of hybrid lithography workflows, ICS…
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